Adiabatic embedment of nanomechanical resonators in photonic microring cavities

摘要

We report a circuit cavity optomechanical system in which a nanomechanicalresonator is adiabatically embedded inside an optical ring resonator withultralow transition loss. The nanomechanical device forms part of the top layerof a horizontal silicon slot ring resonator, which enables dispersive couplingto the dielectric substrate via a tapered nanogap. Our measurements show nearlyuncompromised optical quality factors (Q) after the release of the mechanicalbeam.